发明名称 |
ANODE HOLDER AND PLATING DEVICE |
摘要 |
Provided are: an anode holder for preventing the spread of a flux film and an additive between an exterior space and an interior space in which an anode is positioned; and a plating device provided with the same. This anode holder (60) has: an interior space (61) for storing an anode; a diaphragm configured so as to cover the front surface of the interior space (61); a hole (71) connecting to the interior space (61), and formed in the outer surface of the anode holder; and a valve (91) for sealing the hole (71). |
申请公布号 |
WO2015119182(A1) |
申请公布日期 |
2015.08.13 |
申请号 |
WO2015JP53178 |
申请日期 |
2015.02.05 |
申请人 |
EBARA CORPORATION |
发明人 |
YAHAGI, MITSUTOSHI;KIMURA, MASAAKI;TSUJINO, JUNICHIRO |
分类号 |
C25D17/12;C25D17/00 |
主分类号 |
C25D17/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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