发明名称 ANODE HOLDER AND PLATING DEVICE
摘要 Provided are: an anode holder for preventing the spread of a flux film and an additive between an exterior space and an interior space in which an anode is positioned; and a plating device provided with the same. This anode holder (60) has: an interior space (61) for storing an anode; a diaphragm configured so as to cover the front surface of the interior space (61); a hole (71) connecting to the interior space (61), and formed in the outer surface of the anode holder; and a valve (91) for sealing the hole (71).
申请公布号 WO2015119182(A1) 申请公布日期 2015.08.13
申请号 WO2015JP53178 申请日期 2015.02.05
申请人 EBARA CORPORATION 发明人 YAHAGI, MITSUTOSHI;KIMURA, MASAAKI;TSUJINO, JUNICHIRO
分类号 C25D17/12;C25D17/00 主分类号 C25D17/12
代理机构 代理人
主权项
地址