| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a molecular beam crystal growth apparatus and a semiconductor device manufacturing method, enabling stable growth of a good crystal. <P>SOLUTION: The molecular beam crystal growth apparatus includes: a crucible 11 having an opening 11a to eject a material; a shield member 18 for covering the outer circumference of the crucible 11 and the edge of the opening 11a; a cooling member 21 for cooling the shield member 18; and a substrate holding member for holding a substrate in a manner to face the crucible 11. A cover 19 is disposed on the shield member 18 to cover the crucible 11 from vertical upward. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
