发明名称 SOLID-STATE IMAGING ELEMENT AND ELECTRONIC DEVICE
摘要 The present disclosure relates to a solid-state imaging element and an electronic device capable of suppressing occurrence of a dark current and acquiring higher image quality. The solid-state imaging element includes a high-concentration diffusion layer configured to serve as a connection portion by which a wiring is connected to a semiconductor substrate, and a junction leak control film formed to cover a surface of the diffusion layer. Also, to connect the wiring to the diffusion layer, a width of an opening formed in an insulation film stacked on the semiconductor substrate is greater than a width of the diffusion layer. Further, in a charge accumulation portion configured to accumulate a charge generated by a photoelectric conversion portion generating the charge according to an amount of received light, the junction leak control film is also used as a capacitor film of the charge accumulation portion. Furthermore, a stack structure in which a silicon oxide or low interface state oxide film is formed is included between the diffusion layer and the junction leak control film. The present technology can be applied to, for example, a CMOS image sensor.
申请公布号 EP2793263(A4) 申请公布日期 2015.08.12
申请号 EP20120857567 申请日期 2012.12.04
申请人 SONY CORPORATION 发明人 SATO NAOYUKI
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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