Stacker and static elimination device for the same

摘要

The present invention provides a static elimination device which is used for a stacker with a fan filter device. Characterize in that the static elimination device is provided at the end side of each shelf facing the fan filter device in the stacker. Said end side is opposite to the end side of the shelf which a cartridge moves in and out. Two ends of the static elimination device are free to rotate and connected to shelf holders at said end side. Under the action of the fan filter device blowing the airflow, the ions, which are used to eliminate the static, are blown from the static elimination device into the cartridge of the shelf and the surface of the glass substrate on the cartridge. The present invention further provides a stacker. The stacker and the static elimination device according to the present invention can effectively eliminate the static of the cartridge and the glass substrate surface in the same, which can decrease the equipment costs.

主权项

1. A static elimination device, which is used for a stacker with a fan filter device, wherein the static elimination device is provided at the end side of each shelf facing the fan filter device in the stacker, said end side is opposite to the end side of the shelf which a cartridge moves in and out, two ends of the static elimination device are free to rotate and connected to shelf holders at said end side;
under the action of the fan filter device blowing the airflow, the ions are blown from the static elimination device into the cartridge of the shelf and the surface of the glass substrate on the cartridge, which is used to eliminate the static on the glass substrate; the static elimination device comprises a controller which is used to control the static elimination device to rotate in any angle.