| 发明名称 | Inspection apparatus and inspection method | ||
| 摘要 | An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes: an irradiation part that irradiates the photovoltaic cell panel with pulsed light (pump light) emitted from a femtosecond laser; a detecting part that detects an electromagnetic wave pulse, which is generated from the photovoltaic cell panel according to the irradiation of the pump light; and a continuous light irradiation part that irradiates a portion, which is irradiated with the pump light in the photovoltaic cell panel, with continuous light. | ||
| 申请公布号 | US9103870(B2) | 申请公布日期 | 2015.08.11 |
| 申请号 | US201313744987 | 申请日期 | 2013.01.18 |
| 申请人 | SCREEN HOLDINGS CO., LTD. | 发明人 | Nakanishi Hidetoshi;Tonouchi Masayoshi;Kawayama Iwao |
| 分类号 | G01R31/00;G01R31/26;G01N21/95;H02S50/10 | 主分类号 | G01R31/00 |
| 代理机构 | McDermott Will & Emery LLP | 代理人 | McDermott Will & Emery LLP |
| 主权项 | 1. An inspection apparatus that inspects a photo device, the inspection apparatus comprising: an irradiation part that irradiates said photo device with pulsed light emitted from a femtosecond laser; a detecting part that detects an electromagnetic wave, which is generated from said photo device according to the irradiation of said pulsed light; a continuous light irradiation part that irradiates a portion, which is irradiated with said pulsed light in said photo device, with continuous light; and an irradiation condition changing part that changes an irradiation diameter of said continuous light. | ||
| 地址 | Kyoto JP | ||