Combined environmental parameter sensor

摘要

A combination sensor and corresponding method of measuring a plurality of environmental parameters uses a pressure sensor disposed on an integrated circuit die; a humidity sensor disposed on the integrated circuit die; and a circuit coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing.

主权项

1. A combination sensor comprising:
a pressure sensor disposed on a die, the die including a semiconductor material, wherein the pressure sensor is comprised of four piezo resistive transducers arranged in a first Wheatstone bridge configuration; a humidity sensor disposed on the die, wherein the humidity sensor is comprised of another four piezo resistive transducers arranged in a second Wheatstone bridge configuration; and a circuitry disposed on the die and coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing, wherein the circuitry comprises one or more bond pads and traces that provide one or more common bias voltages to both the pressure sensor and the humidity sensor, and the circuitry further comprises first and second traces on the die for coupling the bias voltages to opposite corners of the first Wheatstone bridge configuration and the second Wheatstone bridge configuration and pressure sensing traces for coupling pressure sensing signals from the other opposite corners of the first Wheatstone bridge configuration and humidity sensing traces for coupling humidity sensing signals from the other opposite corners of the second Wheatstone bridge configuration.