DIFFERENTIAL PRESSURE TRANSDUCER

摘要

FIELD: instrumentation.SUBSTANCE: invention relates to measuring techniques and processes and can be used for in various fields related with medium pressure difference measurements. Pressure transducer comprises case to house semiconductor sensors with strain gages arranged thereon, two cavities filled with electrically insulating fluid and arranged along fluid flow. First semiconductor sensor and first strain gage are arranged between cavities. Second semiconductor sensor is arranged parallel with first semiconductor sensor. Aforesaid case is sealed by shaped membranes arranged with clearance relative to case sides. Semiconductor sensors are composed of micro electromechanical different-thickness structures. Second sensor of strain gage side is connected with atmosphere and features thickness larger than that of first sensor.EFFECT: decreased error.2 dwg