TARGET SUPPLY DEVICE, CONTROL SYSTEM OF THE SAME, CONTROL DEVICE OF THE SAME, AND CONTROL CIRCUIT OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a target supply device capable of suppressing wasteful consumption of a target.SOLUTION: A target supply device 1 controls gas pressure inside a tank 30 for storing molten tin 34 which is liquid melting target material output from a nozzle 31 by gas pressure supplied from a gas cylinder 40 comprising a pressure controller 41. The target supply device 1 comprises: a gas flow channel L2 with one end connected to the tank 30 and the other end forming an exhaust aperture La; a valve 43 disposed on the gas flow channel L2; and a controller 60 decompressing inside of the tank 30 by opening the valve 43 when the molten tin 34 is not output from the nozzle 30. When EUV light is not output, consumption of the molten tin 34 is suppressed by stopping the supply or reducing supply speed of the target 13.