| 摘要 |
<p>The present invention relates to a film-forming apparatus for forming thin films having high gas barrier characteristics, such as a diamond-like carbon (DLC) film, SiOx film, SiOC film, SiOCN film, SiNx film, and AlOx film, on the inner surface and/or outer surface of containers, such as polyethylene terephthalate bottles. The film-forming apparatus is provided with: a vacuum chamber for forming, in a vacuum state, a film on a surface of a container (4) using a heat generating body (21); an evacuating means for evacuating the vacuum chamber; and a relatively moving means for relatively moving the container (4) and the heat generating body (21) in the vacuum chamber after starting evacuation of the vacuum chamber.</p> |
