| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device which prevents a mold from being damaged and yield from being reduced.SOLUTION: An imprint device forms a pattern on a substrate by molding resin on the substrate using a die and releasing the die from the molded resin. This device includes: a resin supply part which supplies the resin by dropping the resin on the substrate; a detection part which, before molding, detects an area where each of a plurality of droplets of the resin on the substrate supplied by the resin supply part exists; and a control part which performs error processing when it is determined that the area is abnormal on the basis of detected result by the detection part. |
