EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides an exposure apparatus which performs a scanning exposure of each of a plurality of shot regions on a substrate, comprising a measuring device including a first detector configured to perform detection with respect to a measurement point on the substrate and a second detector configured to perform detection with respect to the measurement point prior to detection by the first detector, and configured to measure a height of the substrate based on an output from the first detector and an output from the second detector, and a processor configured to determine, based on measurement obtained based on an output from the first detector along with a scanning exposure of a first shot region, a first measurement point where the measuring device performs measurement first based on an output from the second detector with respect to a second shot region.

主权项

1. An exposure apparatus which performs a scanning exposure of each of a plurality of shot regions on a substrate to radiation, the apparatus comprising:
a measuring device including a first detector configured to perform detection with respect to a measurement point on the substrate in a region being exposed to radiation along with scanning of the substrate and a second detector configured to perform detection with respect to the measurement point along with scanning of the substrate prior to detection by the first detector, and configured to measure a height of the substrate based on each of an output from the first detector and an output from the second detector; and a processor configured to determine, based on measurement obtained by the measuring device based on an output from the first detector along with a scanning exposure of a first shot region to radiation, a first measurement point where the measuring device performs measurement first based on an output from the second detector with respect to a second shot region of which a scanning exposure is performed after the first shot region.