| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober which supplies air having high cleanliness and a low dew point into a chamber.SOLUTION: A prober 1 includes: a chamber 2 which stores a wafer chuck 21 and a probe card 22; a circulation duct 3 which is connected with the chamber 2 through an intake port 2a and an exhaust port 2b and forms an air circulation passage; and a fan filter unit 42 and an exhaust fan 43 which circulate the air in the circulation passage. The prober 1 further includes dry air supply means 5 which supplies dry air for lowering a dew point of the air to the interior of the circulation duct 3. |
