CONTAINER INTERCHANGING METHOD

摘要

A container interchanging method is provided. The container interchanging method provides that a first container accommodating a processed substrate therein and a second container accommodating an unprocessed substrate therein are interchanged in a container connection mechanism of a substrate transfer chamber. The substrate transfer chamber includes the container connection mechanism to which the container accommodating the substrate is connected. The substrate transfer chamber is configured to unload the substrate from the container connected to the container connection mechanism. The substrate transfer chamber further includes a buffer configured to mount the container. When the first container and the second container are interchanged in the container connection mechanism, any one of the first container and the second container is temporarily stored in the buffer.

主权项

1. A container interchanging method comprising:
when interchanging a first container, into which a processed substrate is accommodated, and a second container, into which an unprocessed substrate is accommodated, in a container connection mechanism of a substrate transfer chamber, the substrate transfer chamber further including a buffer configured to mount the first or second container, storing the first or second container in the buffer temporarily, wherein the substrate transfer chamber includes the container connection mechanism to which the first or second container is connected, the substrate transfer chamber being configured to unload the processed or unprocessed substrate from the first or second container connected to the container connection mechanism.