| 发明名称 | Sensing devices and methods | ||
| 摘要 | Embodiments of the present disclosure include devices and methods for humidity and temperature sensing. For example, in one embodiment, a sensing device can include a first surface acoustic wave (SAW) component, wherein the first SAW component is a temperature component, a second SAW component, wherein the second SAW component is a humidity component, a third SAW component, wherein the third SAW component is a reference component, and a piezoelectric layer, wherein the first SAW component, the second SAW component, and the third SAW component are on a surface of the piezoelectric layer. | ||
| 申请公布号 | US9097638(B2) | 申请公布日期 | 2015.08.04 |
| 申请号 | US201113208107 | 申请日期 | 2011.08.11 |
| 申请人 | Honeywell International Inc. | 发明人 | Avramescu Viorel;Bostan Cazimir G.;Georgescu Ion |
| 分类号 | G01N7/00;G01N29/02;G01N29/24;G01N29/30 | 主分类号 | G01N7/00 |
| 代理机构 | Brooks, Cameron & Huebsch, PLLC | 代理人 | Brooks, Cameron & Huebsch, PLLC |
| 主权项 | 1. A sensing device, comprising: a first surface acoustic wave (SAW) component, wherein the first SAW component is a temperature component and wherein silicon dioxide (SiO2) is formed only on one surface of an interdigitated transducer (IDT) of the first SAW component; a second SAW component, wherein the second SAW component is a humidity component and wherein silicon dioxide (SiO2) is formed only on one surface of an interdigitated transducer (IDT) of the second SAW component; a third SAW component, wherein the third SAW component is a temperature reference component and wherein silicon dioxide (SiO2) is formed only on one surface of an interdigitated transducer (IDT) of the third SAW component; and a piezoelectric layer, wherein the first SAW component, the second SAW component, and the third SAW component are on a surface of the piezoelectric layer. | ||
| 地址 | Morristown NJ US | ||