Apparatus for inspecting integrated circuit

摘要

An apparatus for inspecting an integrated circuit is an apparatus for inspecting an integrated circuit having a semiconductor substrate and a circuit portion formed on a front face a side of the semiconductor substrate. The apparatus comprises a light generation unit for generating light L for irradiating the integrated circuit, a wavelength width adjustment unit, for adjusting the wavelength width of the light irradiating the integrated circuit, an irradiation position adjustment unit for adjusting the irradiation position of the light irradiating the integrated circuit, and a light detection unit for detecting the light from the integrated circuit when the light from the light generation unit irradiates the circuit portion through a rear face of the semiconductor substrate.

主权项

1. An apparatus for inspecting an integrated circuit having a semiconductor substrate and a circuit portion formed on a front face side of the semiconductor substrate, the apparatus comprising:
a superluminescent diode configured to output light having a wavelength width; a scan optical system configured to receive the outputted light and adjust an irradiation position of the outputted light and configured to receive reflected light that is reflected from the integrated circuit; and a photosensor configured to detect the reflected light.