Charged particle radiation apparatus, and method for displaying three-dimensional information in charged particle radiation apparatus

摘要

Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.

主权项

1. A charged particle radiation apparatus, comprising:
a sample holder including a sample stage to hold a sample; a sample chamber to which the sample holder is inserted; a gun to generate a charged particle beam to be applied to the sample; a detector to detect a radiation from the sample; and a processor to acquire an image from the radiation from the sample, wherein the sample holder includes a rotation mechanism including a rotary shaft being capable of rotating the sample stage around a rotation axis by a predetermined angle, and a shielding mechanism capable of forming an airtight chamber around the sample stage, and the charged particle radiation apparatus further comprising a piping to supply the sample with a medium which reacts to the sample, wherein at least a part of the piping is in the rotary shaft and the shielding mechanism; wherein the processor acquires a first image before supplying the medium, a second image after supplying the medium, three dimensional information from the first image and the second image, and a distance between rare metal catalyst particles.