发明名称 |
Nanowire sensor having nanowire of network structure |
摘要 |
A nanowire sensor having a nanowire in a network structure includes: source and drain electrodes formed over a substrate; a nanowire formed between the source and drain electrodes and having a network structure in which patterns of intersections are repeated; and a detection material fixed to the nanowire and selectively reacting with a target material introduced from outside. |
申请公布号 |
US9099543(B2) |
申请公布日期 |
2015.08.04 |
申请号 |
US201214111727 |
申请日期 |
2012.03.19 |
申请人 |
POSTECH ACADEMY-INDUSTRY FOUNDATION |
发明人 |
Lee Jeong Soo;Jeong Yoon Ha;Rim Tai Uk;Baek Chang Ki;Kim Sung Ho;Kim Ki Hyun |
分类号 |
H01L27/14;H01L21/00;H01L29/775;G01N27/06;G01N27/327;G01N33/487;H01L29/66;B82Y40/00 |
主分类号 |
H01L27/14 |
代理机构 |
Kile Park Reed & Houtteman PLLC |
代理人 |
Kile Park Reed & Houtteman PLLC |
主权项 |
1. A nanowire sensor having a nanowire in a network grid structure, comprising:
source and drain electrodes formed over a substrate; a nanowire grid formed between the source and drain electrodes and having a network structure in which patterns of intersections are repeated forming the network grid structure; and a detection material fixed to the nanowire grid and selectively reacting with a target material introduced from outside. |
地址 |
Pohang-Si, Gyeongsangbuk-Do KR |