摘要 |
PROBLEM TO BE SOLVED: To provide a large-screen semiconductor detector capable of quickly picking up a transmission image by imaging an entire imaging sample at one time even if the imaging sample is a large-sized metallic structure.SOLUTION: A partial module 100 that constitutes a semiconductor detector includes detection elements 1 each generating a current in response to an incident X-ray; detection element substrates 2 each disposed in rear of the detection elements 1, elongated in the same direction as an X-ray radiation direction, and having the detection elements 1 disposed on both surfaces thereof; a circuit board 3 to which the plurality of detection element substrates 2 is coupled by a coupling member; and signal processing circuits 6 disposed on both surfaces of the circuit board 3 and coupled to wiring boards 5 withdrawn from the detection element substrates 2. A combination of a plurality of partial modules 100 constitute the semiconductor detector. |