发明名称 |
STRUCTURE PRODUCTION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To reduce time required for reducing a solvent amount included in a coating film, in room temperature imprint. ! SOLUTION: A structure production method is characterized to have: a step for coating a coating agent including an inorganic material and solvent to a base material for forming a coating film; a step for reducing the solvent amount included in the coating film by a predetermined amount; and a step for bringing the coating film and a mold at least whose one side facing the coating film has a solvent adsorption property into contact each other, thereby transferring the mold surface shape to the coating film surface. ! COPYRIGHT: (C)2015,JPO&INPIT |
申请公布号 |
JP2015139936(A) |
申请公布日期 |
2015.08.03 |
申请号 |
JP20140013586 |
申请日期 |
2014.01.28 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
ARITSUKA YUKI ; NAKADA NAOKO ; ISHIKAWA MIKIO |
分类号 |
B29C59/02;B32B3/26;B32B27/00;H01L21/027 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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