发明名称 STRUCTURE PRODUCTION METHOD
摘要 PROBLEM TO BE SOLVED: To reduce time required for reducing a solvent amount included in a coating film, in room temperature imprint. ! SOLUTION: A structure production method is characterized to have: a step for coating a coating agent including an inorganic material and solvent to a base material for forming a coating film; a step for reducing the solvent amount included in the coating film by a predetermined amount; and a step for bringing the coating film and a mold at least whose one side facing the coating film has a solvent adsorption property into contact each other, thereby transferring the mold surface shape to the coating film surface. ! COPYRIGHT: (C)2015,JPO&INPIT
申请公布号 JP2015139936(A) 申请公布日期 2015.08.03
申请号 JP20140013586 申请日期 2014.01.28
申请人 DAINIPPON PRINTING CO LTD 发明人 ARITSUKA YUKI ; NAKADA NAOKO ; ISHIKAWA MIKIO
分类号 B29C59/02;B32B3/26;B32B27/00;H01L21/027 主分类号 B29C59/02
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