| 摘要 |
PROBLEM TO BE SOLVED: To improve measurement accuracy by suppressing influence of a bulk wave generated when a surface acoustic wave is reflected in a reflection unit.SOLUTION: A surface acoustic wave sensor is provided which comprises: a first electrode part which is formed on a piezoelectric substrate and excited by an input signal to generate a first surface acoustic wave on the piezoelectric substrate; a first reflection part reflecting the first surface acoustic wave; a first reaction field which is formed on a propagation path of the first surface acoustic wave between the first electrode part and the first reflection part and in which the object to be measured is arranged; a second electrode part which is formed on the piezoelectric substrate and excited by the input signal to generate a second surface acoustic wave on the piezoelectric substrate; a second reflection part reflecting the second surface acoustic wave; and a phase inversion part which is formed on a propagation path of the second surface acoustic wave between the second electrode part and the second reflection part and which inverts the phase of the second surface acoustic wave. |
