用于制造一表膜的装置与方法，以及一表膜;APPARATUS AND METHOD FOR MANUFACTURING A PELLICLE, AND A PELLICLE

摘要

一种用于制造一表膜之装置，该装置包含：用于加应力于一薄膜之一加应力总成；及用于支撑一基板之一基板支撑件，该加应力总成及该基板支撑件能够相对移动以便在该薄膜受应力时使该基板与该薄膜接触。; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.