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发明名称
Mold for nanoimprint
摘要
본 발명의 나노임프린트용 몰드는, 액정 물질을 함유하고, 당해 액정 물질의 배향에 의해서 릴리프 구조가 형성된 요철면을 갖는다. 이러한 나노임프린트용 몰드는, 전사용 요철면의 면적이 큰 경우에도, 이음매를 형성하지 않고 용이하게 제조되는 것이 가능하다.
申请公布号
KR101540919(B1)
申请公布日期
2015.07.31
申请号
KR20080110612
申请日期
2008.11.07
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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