CHARGED-PARTICLE-BEAM DEVICE, SPECIMEN-IMAGE ACQUISITION METHOD, AND PROGRAM RECORDING MEDIUM

摘要

This charged-particle-beam device is provided with a data processing unit that removes, from a detector signal, the effect that scattering of a primary charged-particle beam before said primary charged-particle beam reaches a specimen has on the spot shape of said primary charged-particle beam. For example, when using an electron microscope to observe a specimen (6) in a non-vacuum atmosphere, the effect that scattering of a primary charged-particle beam due to a barrier film (10) or a gas present in a non-vacuum space (12) has on the spot shape of said primary charged-particle beam is removed from a signal acquired by a detector. This makes it easy to obtain high-quality images.