| 发明名称 |
ACTUATOR CONTROL DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND ACTUATOR CONTROL METHOD |
| 摘要 |
A spectroscopic measurement apparatus includes an electrostatic actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, a closed loop system that controls the drive voltage applied to the electrostatic actuator depending on a detection signal from the gap detector, and a gain setting unit that sets a gain in the closed loop system depending on drive characteristics of electrostatic actuator based on the detection signal of the gap detector. |
| 申请公布号 |
US2015212313(A1) |
申请公布日期 |
2015.07.30 |
| 申请号 |
US201514603902 |
申请日期 |
2015.01.23 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
HIROKUBO Nozomu |
| 分类号 |
G02B26/00;H02N1/00;G05B6/02 |
主分类号 |
G02B26/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An actuator control device comprising:
an actuator that is driven by applying a drive voltage; a detection unit that detects a drive amount of the actuator; a feedback control section that controls the drive voltage applied to the actuator depending on the drive amount detected by the detection unit; and a gain setting unit that sets a gain in the feedback loop depending on drive characteristics of the actuator based on the drive amount detected by the detection unit. |
| 地址 |
Tokyo JP |
