| 摘要 |
PURPOSE: An assembling type vacuum chamber is provided to reduce economics loss due to maintenance by separating a broken frame and replacing it. CONSTITUTION: In an assembling type vacuum chamber, a chamber body(6) has a vacuum chamber(4) therein. The chamber is comprised of a top frame(10), a bottom frame(12), a lateral frame(14), and a backward frame(16). A guide groove is formed in the combining side of two laterals of the top frame and bottom frame. Insertion grooves(10b,12b) are formed in the top side and front and backside of the bottom frame. A protrusion is formed in the outside of a combination surface in the top and bottom of the lateral frame.
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