MICRO DEVICE WITH STABILIZATION POST

摘要

A method and structure for stabilizing an array of micro devices is disclosed. A stabilization layer includes an array of stabilization cavities and array of stabilization posts. Each stabilization cavity includes sidewalls surrounding a stabilization post. The array of micro devices is on the array of stabilization posts. Each micro device in the array of micro devices includes a bottom surface that is wider than a corresponding stabilization post directly underneath the bottom surface.

主权项

1. A method of forming an array of micro devices comprising:
patterning a device layer to form an array of micro device mesa structures over a handle substrate; forming a patterned sacrificial layer including an array of openings over the corresponding array of micro device mesa structures; forming a stabilization layer over the patterned sacrificial layer and within the array of openings; and removing the handle substrate.