COATING FILM REMOVAL APPARATUS

摘要

Provided is a coating film removal apparatus which is capable of easily and accurately removing a part of a coating film that is applied over a substrate. A coating film removal apparatus according to the present invention is provided with: a coating film removal apparatus main body (31) that comprises a remover liquid supply means (5) which ejects a remover liquid (8) from a remover liquid supply port (5a) toward a coating film removal portion that is at a predetermined position of a coating film (2) on a substrate (1) and a remover liquid recovery means (6) for recovering the ejected remover liquid (8) through a remover liquid recovery port (6a); and a height adjustment device which adjusts the distance between the surface of the substrate (1) and a flat bottom surface of the coating film removal apparatus main body (31), said bottom surface being positioned between the remover liquid supply port (5a) and the remover liquid recovery port (6a).