| 摘要 |
PROBLEM TO BE SOLVED: To provide a process liquid nozzle which removes foreign objects in a process liquid to inhibit clogging therein and thereby properly supplies the process liquid to a substrate.SOLUTION: A process liquid nozzle 132 includes: an upper block 200; a lower block 201; a solvent circulation space 202 formed in an inner space of the upper block 200 and the lower block 201; and a solvent flow passage 244 which connects a solvent discharge port 243 with the circulation space 202. The circulation space 202 includes foreign object collection spaces 231 which are formed below an upper end of the flow passage 244 and used for precipitating and collecting the foreign objects in the solvent. |
