THERMAL FUSE ASSEMBLY OF INLINE HEATER

摘要

The present invention relates to a thermal fuse which can block electricity of a heating line promptly in case the chemical temperature in a vessel increases above a setting temperature in an inline heater which is used in heating a chemical during a semiconductor manufacturing process. The thermal fuse assembly includes: a bonding part which connects a conductor terminal on both sides of a thermal fuse and a conductor exposed by removing an outer coating of a lead wire to the conductor on both sides of the thermal fuse; a first protection layer which is formed by inserting a first fluororesin shrink tube into the bonding part on both sides of the thermal fuse, the exposed conductor of the lead wire, a lead wire coating adjacent to the exposed conductor of the lead wire and the thermal fuse conductor terminal and then performing thermal contraction of the same; a stainless tube which is inserted into the outer part of the first protection layer of the lead wire connected to both sides of the thermal fuse under the state that one of the thermal fuse conductors is bent in order for the lead wire connected to both sides of the thermal fuse to proceed along the same direction; and a second protection layer which is formed by inserting a second fluororesin shrink tube into the thermal fuse, the stainless tube and the outside of the first protection layer exposed in the outside of the stainless tube and then performing thermal contraction of the same.