发明名称 |
METHOD OF MAKING A SUSPENDED MEMBRANE DEVICE |
摘要 |
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities. |
申请公布号 |
US2015210539(A1) |
申请公布日期 |
2015.07.30 |
申请号 |
US201514679906 |
申请日期 |
2015.04.06 |
申请人 |
STMICROELECTRONICS PTE LTD |
发明人 |
LE NEEL Olivier;LOH Tien Choy |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method, comprising:
forming a support layer on a substrate; forming a membrane layer on the support layer; forming a plurality of openings in the membrane; and forming a plurality of anchors in a single, contiguous chamber by removing portions of the support layer below the openings in the membrane. |
地址 |
Singapore SG |