| 摘要 |
<p>Disclosed is a method of manufacturing a rear face electrode type solar battery (1), including: a step for forming a first rear face side passivation film (11) including first conductivity type dopant; a step of forming a film (31) containing second conductivity type dopant; a step in which, by heat treatment of a silicon substrate (4), a first conductivity type semiconductor region (9) is formed by first conductivity type dopant being dispersed from the first rear face side passivation film (11) in part of the silicon substrate (4), and a second conductivity type semiconductor region (10) is formed by second conductivity type dopant being dispersed from the film (31) containing second conductivity type dopant in at least part of a region of the silicon substrate (4) that is different from the region in which the first conductivity type dopant is dispersed; a step of removing the film (31) containing the second conductivity type dopant; and a step of forming a second rear face side passivation film (12). In this way, the p+ region (10) can be formed by dispersing the second conductivity type dopant without needing to separately provide a first rear face side passivation film, and at the same time as the formation of the n+ region (9) by dispersion of the first conductivity type dopant.</p> |
