发明名称 Flow control device
摘要 A flow control device (1) is capable of performing accurate flow control over a wide pressure range includes: a housing (10); a diaphragm (35) splitting the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and being activated by the differential pressure generated between the gas chamber side and the fluid chamber side; and a valve body (31) which operates in integration with the diaphragm (35) to regulate the flow of the fluid introduced to the fluid chamber side (29). The diaphragm (35) includes: a base part (35b) provided in a substantially central part of the diaphragm; and a thin film part (35c) provided on the outer rim of the base part (35b). An opposing surface which is provided on the fluid chamber side to oppose the diaphragm includes a retaining form (40d) which retains the shape of the thin film part (35c) deformed by the differential pressure.
申请公布号 EP2620677(A3) 申请公布日期 2015.07.29
申请号 EP20130152442 申请日期 2013.01.24
申请人 SURPASS INDUSTRY CO., LTD. 发明人 HIRAI, KAZUKI;IGARASHI, HIROKI
分类号 F16K7/12 主分类号 F16K7/12
代理机构 代理人
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