发明名称 半導体装置及びその製造方法
摘要 <p>The invention is directed to a semiconductor device which is manufactured by a BiCMOS process in which a process of manufacturing a V-NPN transistor is rationalized. Furthermore, the hFE of the transistor is adjusted to a large value. An N type base width control layer is formed being in contact with a bottom portion of a P type base region under an N+ type emitter region. The N type base width control layer shallows a portion of the P type base region under the N+ type emitter region partially. The P type base region is formed by using a process of forming a P type well region, and the N type base width control layer is formed by using a process of forming an N type well region, thereby achieving the process rationalization.</p>
申请公布号 JP5755939(B2) 申请公布日期 2015.07.29
申请号 JP20110115618 申请日期 2011.05.24
申请人 发明人
分类号 H01L21/8249;H01L21/331;H01L21/8222;H01L21/8248;H01L27/06;H01L29/732 主分类号 H01L21/8249
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