发明名称 SELF-ORGANIZATION COMPOSITION FOR PATTERN FORMATION AND PATTERN FORMATION METHOD
摘要 The present invention is a self-organization composition for pattern formation comprising a block copolymer [A] containing a polystyrene block having styrene units and a polyalkyl(meth)acrylate block having alkyl(meth)acrylate units, the self-organization composition for pattern formation being characterized in that the block copolymer [A] has groups (±) that are bonded to at least one terminus of the main chain and that contain hetero atoms. The hetero atoms are preferably at least one type selected from a group of oxygen, nitrogen, sulfur, phosphorus, tin, and silicon atoms.
申请公布号 EP2781550(A4) 申请公布日期 2015.07.29
申请号 EP20120848021 申请日期 2012.11.01
申请人 JSR CORPORATION 发明人 NAMIE YUJI;MINEGISHI SHINYA;NAGAI TOMOKI;SONE TAKUO
分类号 C08L53/00;C08F293/00;C08F297/02;G03F7/004;H01L21/027 主分类号 C08L53/00
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