MOVING TYPE PLASMA APPARATUS

摘要

The present invention relates to a moving type plasma apparatus and, more particularly, to a moving type plasma apparatus capable of texturing a substrate by moving a plasma source unit which generates plasma. The moving type plasma apparatus according to the present invention includes a tray which includes a substrate arranged on an upper side thereof, the plasma source unit which generates the plasma and radiates the plasma in the arrangement direction of the tray, and a moving unit which linearly moves the plasma source unit with regard to the tray. The plasma source unit linearly moves and radiates the plasma on the substrate which is loaded on the tray.