| 摘要 |
<p>PROBLEM TO BE SOLVED: To sequentially calculate information (vibration acceleration, vibration speed, and vibration displacement) acting on the vibration of this electrostatic induction type vibration sensor by a simple calculation from a power generation voltage of the electrostatic induction type vibration sensor.SOLUTION: An arithmetic device 1 calculates at least one of the vibration displacement, the vibration speed, and the vibration acceleration of this electrostatic induction type vibration sensor 3 using a power generation voltage of the electrostatic induction type vibration sensor 3 in a control part 11. The electrostatic induction type vibration sensor 3 generates power according to the change of the relative position between a charge electrode generated accompanied with the vibration and a counter electrode provided on a second substrate while the charge electrode provided on a first substrate and the counter electrode provided on a second substrate face each other. The arithmetic device 1 calculates at least one of the vibration displacement, the vibration speed, and the vibration acceleration of the electrostatic induction type vibration sensor 3 by a calculation under the condition that the electrode vibration speed acting on the change of the relative position of the counter electrode for the charge electrode becomes proportional to the power generation voltage.</p> |
