| 摘要 |
PROBLEM TO BE SOLVED: To prevent local deformation of a reflector from being generated in fixing and retaining the reflector on a table of a stage in a vacuum container, and stably maintain the reflector while keeping initial accuracy of manufacturing.SOLUTION: In supporting a reflector of a laser length measuring device on a table of a stage, there is fixed on the table a reflector holder in which a recess with a seating surface for placing the reflector is formed on one side thereof. Then, the reflector is placed and supported on the seating surface of the recess. A pressing plate provided with an elastic body on one side thereof is also disposed so as to face the elastic body to a front part of the reflector and fitted to the reflector holder. The reflector is retained in such a state that the reflector is elastically energized toward a rear side thereof by pressing the elastic body against the front part of the reflector. |
