发明名称 |
SEMICONDUCTOR DEVICE MODELS INCLUDING RE-USABLE SUB-STRUCTURES |
摘要 |
Methods and tools for generating measurement models of complex device structures based on re-useable, parametric models are presented. Metrology systems employing these models are configured to measure structural and material characteristics associated with different semiconductor fabrication processes. The re-useable, parametric sub-structure model is fully defined by a set of independent parameters entered by a user of the model building tool. All other variables associated with the model shape and internal constraints among constituent geometric elements are pre-defined within the model. In some embodiments, one or more re-useable, parametric models are integrated into a measurement model of a complex semiconductor device. In another aspect, a model building tool generates a re-useable, parametric sub-structure model based on input from a user. The resulting models can be exported to a file that can be used by others and may include security features to control the sharing of sensitive intellectual property with particular users. |
申请公布号 |
WO2015109035(A1) |
申请公布日期 |
2015.07.23 |
申请号 |
WO2015US11487 |
申请日期 |
2015.01.14 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ILORETA, JONATHAN;LAFFIN, MATTHEW A.;POSLAVSKY, LEONID;KAACK, TORSTEN;ZHAO, QIANG;LEE, LIE-QUAN |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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地址 |
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