| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit for process evaluation in which the information, becoming a determination material for subtle process control, can be collected in a short time.SOLUTION: A mask ROM, as a semiconductor integrated circuit for process evaluation, has a row decoder giving a row selection voltage, for activating a transistor constituting a memory cell to be read, when reading data therefrom, a sense amplifier for determining the data read out from the memory cell by comparing a current flowing through the memory cell with a reference current. The mask ROM is further provided with means 200a for switching the row selection voltage and means for switching the reference current. |
