PLANAR WAVEGUIDE WITH OPTICAL CONVERSION AND METHOD FOR MANUFACTURING SAME

摘要

The purpose of the present invention is to provide a planar waveguide with optical conversion that has high precision and can easily be manufactured. A manufacturing method for this planar waveguide with optical conversion provides a planar waveguide optical path conversion mirror structure that is easily manufactured and provided with a mirror surface with a highly precise mirror angle and with little surface roughness. Specifically, a planar waveguide provided with a mirror that carries out optical path conversion can be provided by a wafer process. Therefore, mounting of a mirror that carries out light path conversion becomes unnecessary, and a single unit integrated module can be manufactured at a low manufacturing cost.