| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a degree of freedom in designing flow passages formed inside chemical circuits or provide a technology that suppresses the chemical circuits from being enlarged. <P>SOLUTION: This invention provides a chemical circuit device. The chemical circuit device including a main circuit member having chemical flow passages for circulating chemicals and main openings formed at ends of the chemical flow passages, a subcircuit member that is assembled with the main opening that contacted the main circuit member while a load is being applied to the main circuit member and having a sealing surface that seals the main opening from the outside of the chemical circuit device, an accommodating section that accommodates the main circuit member, and openings for communications prepared at positions leading to the main opening with the main circuit member accommodated, and a frame member that transmits the reaction force of the load from the accommodation section to the main circuit member, is provided. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
