发明名称 インプリント・リソグラフィ
摘要 <p>An imprinting method is disclosed that, in embodiment, includes contacting first and second spaced target regions of an imprintable medium on a substrate with first and second templates respectively to form respective first and second imprints in the medium and separating the first and second templates from the imprinted medium.</p>
申请公布号 JP5753292(B2) 申请公布日期 2015.07.22
申请号 JP20140041529 申请日期 2014.03.04
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址