MULTI-LAYER MESH STRUCTURE AND MANUFACTURING METHOD OF IT

摘要

The present invention relates to a multilayer mesh structure where mesh plates having fine meshes with different sizes are combined in multilayers and a manufacturing method thereof. The multilayer mesh structure according to the present invention has fine mesh plates combined in multilayers. In addition, desirably, the multilayer mesh structure according to the present invention should have meshes with different sizes in the multilayer mesh plates. According to an embodiment of the present invention, the manufacturing method for multilayer mesh structure comprises: a step of forming a mesh home with a first pattern by carving a silicon wafer; a step of filling up the mesh home with fillers to manufacture a first mesh plate; a step of forming a mesh home with a second pattern having smaller meshes than the first pattern by using photo resist on the silicon wafer filled up with the first mesh plate; a step of manufacturing a second mesh plate by filling up the mesh home with the second pattern with fillers; and a step of removing photo resists by performing chemical liquid carving. According to the present invention, a very thin plate is used to manufacture a very fine mesh plate and a very thick plate is used to manufacture a relatively bigger fine mesh plate and then the two mesh plates are combined to improve the overall strength of the mesh structure and to reduce the mesh size.