Methods of forming graphene-containing switches

摘要

Some embodiments include methods of forming graphene-containing switches. A bottom electrode may be formed over a base, and a first electrically conductive structure may be formed to extend upwardly from the bottom electrode. Dielectric material may be formed along a sidewall of the first electrically conductive structure, while leaving a portion of the bottom electrode exposed. A graphene structure may be formed to be electrically coupled with the exposed portion of the bottom electrode. A second electrically conductive structure may be formed on an opposing side of the graphene structure from the first electrically conductive structure. A top electrode may be formed over the graphene structure and electrically coupled with the second electrically conductive structure. The first and second electrically conductive structures may be configured to provide an electric field across the graphene structure.

主权项

1. A method of forming a switch, comprising:
forming a first electrically conductive structure over a bottom electrode; forming a graphene structure electrically coupled with the bottom electrode and laterally spaced from the first electrically conductive structure; forming a second electrically conductive structure over the bottom electrode and on an opposing side of the graphene structure from the first electrically conductive structure; forming a top electrode over the graphene structure; the bottom electrode being electrically coupled with one of the first and second electrically conductive structures, the top electrode being electrically coupled with the other of the first and second electrically conductive structures; and wherein the first and second electrically conductive structures impart an electric field across the graphene structure.