Impedance matching device, linear motion module, and radio frequency power supply device

摘要

An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.

主权项

1. An impedance matching device comprising:
a first variable capacitor connected to an RF power source and including a first shaft moving linearly; a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion; a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit; a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit, a motion control unit adapted to control the first linear motion unit; a power detection unit adapted to detect a reflected wave reflected in a direction of the RF power source; and a control unit adapted to control the motion control unit by receiving an output signal of the power detection unit and an output signal of the first displacement sensor.