Emitter, gas field ion source, and ion beam device

摘要

Provided is an ion source emitter that does not cause significant extraction voltage changes even when an apex portion of the emitter is repeatedly regenerated. The emitter has a shape of a triangular pyramid with the single atom at the apex. An apex portion of the emitter is substantially shaped like a hexagon when viewed from the apex side.

主权项

1. An emitter used with an ion source of an ion beam device, the emitter comprising:
a base part formed of a single crystal metal; and a needle-like apex portion formed on the base part, wherein the apex portion comprises a pyramid portion having an apex point, and a middle portion located between the pyramid portion and the base part, and wherein the pyramid portion is a structure shaped like a triangular pyramid, and a cross section of the emitter at a line dividing the middle portion and the base part is substantially shaped like a hexagon.