发明名称 CIRCUIT INTEGRE PROTEGE D'UNE ATTAQUE LUMIERE
摘要 <p>The circuit (1) has a semiconductor substrate (4), and a set of layers (3) forming an electronic circuit. The substrate includes a hole (7) that is open on one rear face (6) opposed to the set of layers. A depth (P) is provided at 50% thickness (e) of the integrated circuit, where the depth of the hole lies between 20 and 120 micrometers, i.e. preferably between 40 and 100 micrometers. The hole presents a wall that forms an angle that ranges between 60 and 90 degrees with regard to the face opposed to the set of layers. An independent claim is also included for a method for manufacturing an integrated circuit.</p>
申请公布号 FR2994769(B1) 申请公布日期 2015.07.17
申请号 FR20120057994 申请日期 2012.08.27
申请人 OBERTHUR TECHNOLOGIES 发明人 BATTISTELLO ALBERTO;GIRAUD CHRISTOPHE;MORIN NICOLAS;MATHA JULIEN
分类号 H01L23/552;H01L21/302;H01L21/461 主分类号 H01L23/552
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