发明名称 |
LIGHT FLUX CONVERSION ELEMENT, LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM AND EXPOSURE METHOD |
摘要 |
A light optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Responsive basic elements have mutually different thickness along the light transmitting direction. |
申请公布号 |
HK1140832(A1) |
申请公布日期 |
2015.07.17 |
申请号 |
HK20100107131 |
申请日期 |
2010.07.26 |
申请人 |
NIKON CORPORATION (KABUSHIKI KAISHA NIKON) |
发明人 |
TOYODA, MITSUNORI |
分类号 |
G03F;G02B;G02B19/00;G02B27/00;G02B27/28;G02B27/44;G03F7/20;H01L21/027 |
主分类号 |
G03F |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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