发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 The present invention provides a semiconductor device and a manufacturing method thereof. The semiconductor device comprises: an activation area provided on a substrate; an inflow channel accumulated on one side of the substrate with a single common cavity; an outflow channel accumulated on another side of the substrate with a single common cavity; a microchannel array which is commonly accumulated on the substrate, of which one end is connected to a side of the inflow channel, and the other side is connected to a side of the outflow channel; and a micro heat sink array to divide the microchannels to be separated.
申请公布号 KR20150083310(A) 申请公布日期 2015.07.17
申请号 KR20140002913 申请日期 2014.01.09
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 JUN, CHI HOON;KO, SANG CHOON;MOON, SEOK HWAN;CHANG, WOO JIN;BAE, SUNG BUM;PARK, YOUNG RAK;NA, JE HO;MUN, JAE KYOUNG;NAM, EUN SOO
分类号 H01L23/34 主分类号 H01L23/34
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