| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of easily obtaining excellent sensitivity and measurement signal of a sensor without adjusting a mounting position of the sensor.SOLUTION: A vacuum pump includes: a rotating portion composed of a rotor having a rotary vane, a cylindrical portion, and a conductor, and a rotor shaft fixed to the rotor; a non-rotating portion provided with a sensor coil of which inductance changes in accompany with temperature change of the rotor; and a control device provided with an oscillator supplying a high frequency voltage to the sensor coil, and a sensor circuit outputting a temperature measurement signal on the basis of modulated voltage of which amplitude is modulated by inductance change of the sensor coil, and detecting the temperature of the rotating portion on the basis of the change by the temperature change of the rotating portion, of eddy current of the rotating portion causing the change of the inductance. |
